Ben Rathsack, PhD

Vice President and Deputy General Manager

Dr. Rathsack is Vice President and Deputy General Manager of Technology and Manufacturing in Tokyo Electron America. His team is responsible for developing advanced equipment and process technologies in lithography track, etch, film deposition and cleans. His team specializes in advanced computational engineering, software applications and data science to develop SMART tools. He has 18 years of semiconductor development experience at Tokyo Electron and Texas Instruments. He is also a Senior Member of Technical Staff (SMTS) who has authored/ co-authored 50 publications and has 30 granted patents. He received his BS in chemical engineering from the University of Illinois/UC and his MS/PhD at the University of Texas/Austin.

Mentoring for Success
Smart Workforce Pavilion

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