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Real-Time/In-situ Process Monitoring using Quartz Crystal Microbalance (QCM) Technology for Front-End Application

11:30 am - 12:00 pm

The Quartz Crystal Microbalance (QCM) has traditionally been used for monitoring and control of electron beam and thermal evaporation deposition of thin films. These methods of deposition are used extensively in the photovoltaic and OLED display manufacturing industries. 

In this presentation, we will discuss new opportunities for Front-End semiconductor factories to monitor process stability and chamber health in real-time using QCM Technologies in CVD/PECVD chambers revealing exciting results for the industry future.


Dan Iacob

Dan Iakob

ON Semiconductor