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Directed Self Assembly: Supply Chain Ecosystem Enablement

10:30 am - 11:00 am

DSA(Directed Self Assembly) is a bottom up materials-based approach that delivers tighter pitches as dictated by semiconductor roadmap, simpler integration schemes and offers attractive complementary solutions to EUV and other patterning processes. The fundamental mechanism of self-assembly has been studied extensively and DSA enabled pitches are a function of materials chemistry. However, unique challenges remain in terms of understanding chemical properties that give rise to complex defectivity modes and levels. There are ‘known unknowns and unknown unknowns’ in DSA materials that underlie the importance of developing a set of measurements and quality protocols that will ensure ability and consistency in measurements of materials’ property, which in turn can contribute to better material designs. A critical need exists for calibrated toolsets to detect drift in materials’ properties with a level of precision that has not been achieved yet. The role of materials suppliers and metrology and analytical tool manufacturer is critical in enabling DSA to migrate from lab to fab with minimal risk.

Speaker

Chandrasekhar Sarma

Chandrasekhar Sarma

Intel

Speaker