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[Semiconductor Component Instrumentation & Subsystems] Case Studies on Addressing Component Quality via Standardization & Adoption

There are now SEMI Standards published aimed to establish baseline measurements of defects introduced by process-critical components. These Standards range from chamber components & RF generators to gas delivery systems to perfluoroelastomers. These on-demand modules will provide an overview of these standards as well as share insight on how implementers and the industry as a whole could benefit.

Agenda

SEMI F51 Standardization - Pefluorelastomer Case Study

Dalia Vernikovsky

ASNA

SEMI F70.1 Standardization - Pressure Pulse Test Case Study

SEMI Dry Pump Standardization Case Study