Update on EUV Lithography: Enabling 2nm and Beyond
EUV lithography is now in high volume production today. Now it is possible to buy electronics enabled by EUV lithography. In this presentation, we review the technical status of EUV lithography with increases in productivity while simultaneously tightening the performance targets. Then we look forward to the next generation of high-NA EUV systems which are being engineered today that will enable continued scaling through this decade.