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[LIVE] Advanced Manufacturing Processes for a Changing Industry

Wednesday, July 22 | 9:00 am - 11:30 am

The semiconductor industry has not been in a straight scaling line for some time. That said, the challenges it faces are daunting as EUVL is inserted more and more into production, and advanced structures flesh out nodes below 5nm. As the industry pushes ahead with advanced structures to continue scaling to 2nm (logic) and below 1znm (DRAM), there will be a need for partnerships to define and speed innovation. This session gathers experts in the major manufacturing processes and supporting areas needed to advance the industry below 5nm.


More Advanced Manufacturing Processes for a Changing Industry Sessions


Debra Vogler

Debra Vogler

President, Instant Insight

Session Moderator


Update on EUV Lithography: Enabling 2nm and Beyond

Michael Lercel

9:00 am - 9:30 am

Advanced Interconnect Scaling: Cu Damascene Extendibility - How Far Can We Go?

Chris Penny

IBM Research
9:30 am - 10:00 am

Scaling DRAM Beyond 1znm

Thy Tran

Micron Technology
10:30 am - 11:00 am

Metrology for Conventional and Quantum Devices in the Few Nanometer to Single Atom Regime

Richard Silver

11:00 am - 11:30 am