With one IC manufacturer having announced it will delay using EUVL until 2021, and another major foundry pivoting away from 7nm, it seems reasonable to take a closer look at the state of advanced lithography and how recent news could impact deployment of different choices as the industry proceeds to 5nm, 3nm, and beyond. Included in the discussion will be the economics issues from a market standpoint. Also of interest is how well the industry can tackle stochastic barriers and address metrology, resist, and mask infrastructure challenges as EUVL is deployed. In the meantime, the industry will continue to need 193i extensions — probably well into 5nm
TechTALK: Advanced Lithography — Delays and Pivots Along the Way to 5nm and Beyond
TechTALKS Stage North Thursday, July 11 10:30am to 12:40pm
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Vice President and Head
ASML Technology Development Center