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Standards

Standards

Why Standards?

SEMI Standards play a critical role in the success and growth of the global microelectronics industry. Standards make equipment, fabs, and the industry fit together and work together by ensuring interoperability of equipment and components, material conformance, and safe and sustainable manufacturing practices and facilities. From sand to system, SEMI Standards touch and influence every step in the production of today’s microelectronics. 

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2017 Event Calendar

Connect to make things work together! Join the SEMI International Standards Program and keep up-to-date with our upcoming events.

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Become a Member

SEMI Standards development activities take place throughout the year in all major manufacturing regions. Ensure your company influences the development of Standards critical to the industry. Get involved and become a SEMI Standards Program Member today. 

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Program Catalog

Meeting Schedule

This meeting set will host 14 committees and over 65 task forces engaged in various standardization activities including: Environmental, Health, and Safety; Factory Automation Hardware and Software; Facilities; Gases and Liquid Chemicals; High Brightness LED (HB-LED); MEMS/NEMS; Microlithography; Photovoltaic; Silicon Wafer; Three-Dimensional Stacked Integrated Circuits (3DS-IC); and Traceability.

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Standards San Francisco Marriott Marquis Monday, July 10 8:00am
  • North America Regional Standards Committee (NARSC), Monday, July 10.
  • Regulations Subcommittee, Monday, July 10 through Wednesday, July 13.
  • International Standards Committee, Thursday, July 13.
View Committee Agenda
Standards San Francisco Marriott Marquis Thursday, July 13
9:00am to 6:00pm

The Global Environmental, Health and Safety Technical Committee focuses on safe and environmentally responsible design, selection, facilitization, operation, maintenance, service, decommissioning, and disposition of equipment and materials.

Task Force Meetings

EH&S Task Forces will meet Monday, July 10 through Wednesday, July 12.

Monday, July 10

  • International Compliance and Regulatory Committee (ICRC) [SEMI EHS Division]

Tuesday, July 11

  • Anchorage TF
  • Fire Protection TF
  • NA Seismic Liaison TF
  • S2 Chemical Exposure TF
  • S3 Revision TF
  • S6 Revision TF
  • S10 Revision TF

Wednesday, July 12

  • EHS Leadership Meetings
  • Energetic Materials EHS TF
  • Hazardous Energy Control Isolation TF
  • Manufacturing Equipment Safety Subcommittee (MESSC)
  • S8/Ergonomics TF
  • S22 (Electrical Safety) TF
  • S23 Global TF
  • S28 Revision TF
View Committee Agenda
Standards San Francisco Marriott Marquis Tuesday, July 11
9:00am to 12:00pm

The Global Facilities Technical Committee identifies the technical needs of the industry for facilities services, equipment and equipment installation. Facilities services typically include equipment installation, power, water, exhaust and support systems. This committee meets jointly with the Global Gases Technical Committee.

Task Force Meetings

Facilities Task Forces will meet Monday, July 10.

Monday, July 10

  • Building Information Modeling (BIM) TF
  • F51 (Perfluoroelastomer) Revision TF
  • Power Grid Harmonics TF
View Committee Agenda
Standards San Francisco Marriott Marquis Tuesday, July 11
9:00am to 12:00pm

The Global Gases Technical Committee identifies the technical needs of the industry for bulk gases, specialty gases, components and gas distribution systems. This committee meets jointly with the Global Facilities Technical Committee.

Task Force Meetings

Gases Task Forces will meet Monday, July 10.

Monday, July 10

  • Filters & Purifiers TF
  • Gases Specification TF
  • Heater Jacket TF
  • Mass Flow Controller TF
  • Materials of Construction of Gas Delivery Systems TF
View Committee Agenda
Standards San Francisco Marriott Marquis Thursday, July 13
10:30am to 12:00pm

The Global HB-LED Technical Committee promotes mutual understanding and improved communication between users and suppliers of HB-LED (high-brightness light-emitting diode) materials, carriers, automation systems and devices.

Task Force Meetings

HB-LED Task Forces will meet Thursday, July 13.

Thursday, July 13

  • HB-LED Joint Wafer/Source Materials/PSS TFs
View Committee Agenda
Standards San Francisco Marriott Marquis Wednesday, July 12
8:00am to 2:00pm

The Global Information & Control Technical Committee develops standards that pertain to the interface of manufacturing tools to each other, to control computers, or to human operators, for the purpose of transferring commands and data used during the manufacturing process.

Task Force Meetings

I&C Task Forces will meet Monday, July 10 through Tuesday, July 11.

Monday, July 10

  • Diagnostic Data Acquisition (DDA) TF
  • I&C GCS (By Invitation Only)
  • I&C NA Leadership
  • PCS TF

Tuesday, July 11

  • Energy Saving Equipment Communication (ESEC) TF
  • GEM 300 TF
  • Graphical User Interfaces (GUI) TF
  • Sensor Bus TF
View Committee Agenda
Standards San Francisco Marriott Marquis Wednesday, July 12
2:00pm to 5:00pm

The Global Liquid Chemicals Technical Committee identifies and develops consensus-based standards fulfilling the technical needs of the industry for liquid chemicals and liquid chemical distribution.

Task Force Meetings

Liquid Chemicals Task Forces will meet Monday, July 10 through Tuesday, July 11.

Monday, July 10

  • High Purity Liquid Assemblies & Systems TF
  • High Purity Polymer Material & Component (F57) TF
  • Ultra Pure Water (UPW) TF

Tuesday, July 11

  • Chemical Analytical Methods (CAM) TF

 

View Committee Agenda
Standards San Francisco Marriott Marquis Wednesday, July 12
2:00pm to 5:00pm

The Global Metrics Technical Committee focuses on standards, specifications, and practices used as the basis for comparative performance measurements of equipment, materials, components, or manufacturing operations to enhance the manufacturing capability of the semiconductor and related industries.

Task Force Meetings

Metrics Task Forces will meet Tuesday, July 11 through Wednesday, July 12.

Tuesday, July 11

  • EMC TF
  • ESD/ESC TF
  • Equipment Cost of Ownership (E-COO) TF

Wednesday, July 12

  • Equipment RAMP Metrics TF
  • RF Measurements TF
View Committee Agenda
Standards San Francisco Marriott Marquis Thursday, July 13
3:30pm to 5:30pm

The Global MEMS/NEMS Technical Committee is currently working on topics including Wafer Bonding Alignment Targets; Step-Height Measurements of Thin, Reflecting Films using an Optical Interferometer; and Ultra High Purity Microscale Fluidic Systems for Use in Scalable Process Environments.

Task Force Meetings

MEMS/NEMS Task Forces will meet Thursday, July 13.

Thursday, July 13

  • MEMS Microfluidics TF
  • Joint MEMS & Sensors Industry Group (MSIG), MEMS Substrate, MEMS Material Characterization TFs
View Committee Agenda
Standards San Francisco Marriott Marquis Tuesday, July 11
10:00am to 12:00pm

The Global Microlithography Technical Committee explores, evaluates and formulates consensus-based microlithography specifications that through voluntary compliance will enhance the manufacturing capability of the semiconductor industry.

View Committee Agenda
Standards San Francisco Marriott Marquis Wednesday, July 12
11:00am to 12:00pm

The Global Photovoltaic Materials Committee develops consensus measurement methods, specifications, guidelines, and practices that promote mutual understanding and improved communication between users and suppliers of photovoltaic materials and related metrology equipment to enhance manufacturing efficiency.

Task Force Meetings

PV Task Forces will meet Wednesday, July 12.

Wednesday, July 12

  • International PV Analytical Test Methods, Metrology, and Inspection TF
View Committee Agenda
Standards San Francisco Marriott Marquis Wednesday, July 12
10:30am to 12:00pm

The Global Physical Interfaces and Carriers Technical Committee develops mechanical, electrical, and special equipment specifications and material movement integration, including substrate support and containment structures.

Task Force Meetings

PI&C Task Forces will meet Wednesday, July 12.

Wednesday, July 12

  • Global PIC Maintenance TF
View Committee Agenda
Standards San Francisco Marriott Marquis Tuesday, July 11
1:00pm to 5:00pm

The Global Silicon Wafer Technical Committee develops specifications and guides for silicon wafers, test methods for silicon wafer quality and geometry, shipping box related topics, wafer ID related topics, and business related topics to support smooth communication between silicon suppliers and customers.

Task Force Meetings

Silicon Wafer Task Forces will meet Monday, July 10.

Monday, July 10

  • International Advanced Wafer Geometry TF
  • International Automated Advanced Surface Inspection TF
  • International SOI TF
  • Joint International Methods, Polished Wafer, Epi Wafer, Terminology TFs
  • Silicon Wafer GCS (By Invitation Only)
View Committee Agenda
Standards San Francisco Marriott Marquis Wednesday, July 12
3:00pm to 5:00pm

The Global 3DS-IC Technical Committee promotes mutual understanding and improved communication between users and suppliers of 3DS-IC materials, carriers, equipment, automation systems and devices.

Task Force Meetings

3DS-IC Task Forces will meet Wednesday, July 12.

Wednesday, July 12

  • 3DS-IC Bonded Wafer Stacks TF
  • 3DS-IC Inspection & Metrology TF
View Committee Agenda
Standards San Francisco Marriott Marquis Monday, July 10
10:00am to 12:00pm

The Global Traceability Technical Committee develops consensus-based standards to enable full traceability of materials and other factory resources in semiconductor manufacturing. This include marking and identification techniques, encode/decode methods, inter-company exchange of information, and characteristics of marking/reading sub-systems needed by the industry.

Task Force Meetings

Traceability Task Forces will meet Monday, July 10.

Monday, July 10

  • T5 Revision TF
  • Traceability 5-Year Review TF
View Committee Agenda
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