Mary Ann Hockey

Director for Advanced & Emerging Lithography
Brewer Science

Mary Ann Hockey is a 45-year veteran of the semiconductor and microelectronics industry in both technology development and lithography process optimizations. She currently serves as Director for Advanced & Emerging Lithography at Brewer Science Inc. Previously she contributed to the company as Manager of the Chemical Engineering Applications team at BSI from 2002-2009. In 2010, Mary Ann joined the Sustaining R&D group with responsibilities for HfO2 and ZrO2 nanoparticle polymer development while characterizing platforms for high refractive and solar cell materials. The past five years as a Senior Project Manager, she has championed direction for the (DSA) Directed Self Assembly team. The primary goal is to establish novel and innovative approaches for full integration of block copolymer flows addressing sub-7 nm lithography nodes. Before joining Brewer Science Inc. in 2002, she worked as a Member of the Technical Staff for Texas Instrument in Freising, Germany and as a Senior Lithography Engineer at NCR, Unisys, and Hughes Aircraft Corporations. During her career, she has been an inventor on multiple chemical patents and has coauthored over 11 technical publications.

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