In the Era of Industry 4.0 and SmartFactory, a tremendous amount of data are being generated by the processing tools and the rapid expansion of sensorization within the factory and integration throughout the supply chain. As process and productivity requirements are key to enable More than Moore’s Law, it is time to re-examine the capability of service and its role in keeping a fab current and productive. Basics of Fault Detection and Run-to-Run control are now only a cost of doing business and not sufficient to remain competitive. Sophisticated diagnostic and even prognostic tools (such as Predictive Maintenance and Virtual Metrology) are needed to accomplish operating profiles customers are demanding. We would like to discuss what the new digital service environment should look like and what is possible if we realize all its components.