ITRS Front End of Line Technologies

Thursday, July 11, 2013
TechXPOT South, South Hall


The ITRS is undergoing a major change this year to reflect the market evolution towards highly mobile flexible devices that allow the users to highly customize them to their liking. As a result he new 2013 ITRS will span from Equivalent Scaling to Customized Functionality. These ITRS working groups will discuss the roadmaps that include the system drivers roadmap, and the requirements and potential areas of innovation for continued scaling challenges for future device architectures, device performance challenges, and the modeling tools challenges for future semiconductors. Presentations include those of system drivers, design, modeling and simulation, process integration, devices, and structures (PIDS), lithography, front end processes (FEP), and emerging research devices (ERD).




Greeting from the ITRS IRC Chair

IRC Session Chair


Overall Roadmap Technology Characteristics  (ORTC)

IRC member from USA–Paolo Gargini


System Drivers

Juan-Antonio Carballo

1:35pm-1:50pm Design
Andrew Kahng
1:50pm-2:05pm Modeling and Simulation

Jürgen Lorenz

2:05pm-2:20pm Process Integration, Devices and Structures (PIDS)
Mustafa Badaroglu
2:20pm-2:35pm Lithography
Mark Neisser
2:35pm-2:50pm Front end Processes (FEP)
Mike Walden
2:50pm-3:05pm Emerging Research Devices (ERD)
An Chen

Emerging Research Materials (ERM)

Michael Garner

3:20pm-3:25pm Q&A
3:25pm-3:30pm Closing Remarks
IRC Chair



Session presented in cooperation with


Please check back frequently for updates and more information as agendas develop and speakers are announced.


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