ITRS CrossCut Technologies

Thursday, July 11, 2013
Extreme Electronics Stage, South Hall


The ITRS is undergoing a major change this year to reflect the market evolution towards highly mobile flexible devices that allow the users to highly customize them to their liking. As a result he new 2013 ITRS will span from Equivalent Scaling to Customized Functionality. These ITRS working groups will present their 2012 roadmap topics that are pervasive throughout the industry, such as green chemistry, sustainability issues, and the future requirements of factory and materials sciences as the industry progresses to the next generation of semiconductors and their applications.  In addition, disciplines of metrology and yield enhancement supporting the above fields of research round out the presentations and panel discussions.

Presentations include factory integration, environment, safety, and health (ESH), metrology, yield enhancement, and emerging research materials (ERM).


Greeting from the ITRS IRC Chair

IRC Session Chair


Overall Roadmap Technology Characteristics (ORTC)

IRC Member from USA- Alan Allan

2:20pm-2:35pm Factory Integration

James Moyne

2:35pm-2:50pm Environment, Safety and Health

Leo Kenny

2:50pm-3:05pm Metrology
Alain Diebold
3;05pm-3:20pm Yield Enhancement

Lothar Pfitzner

3:20pm-3:25pm Q&A
3:25pm-3:30pm Closing Remarks

IRC Session Chair




Session presented in cooperation with 



Please check back frequently for updates and more information as agendas develop and speakers are announced.

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