Standards Technical Education Program (STEP): 450 mm Standards

Wednesday July 11, 2012
1:00pm–5:00pm
San Francisco Marriott Marquis

 

SEMI published its first 450 mm wafer standard in 2008 – SEMI M76, Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers – and for the next four years has published 12 more including specifications for carriers, shipping boxes, and load ports.  The SEMI Standards Program currently has 11 task forces working on 450 mm-related activities with 11 draft standards in the pipeline.

 

This STEP aims to give clear and detailed explanations about the SEMI 450 mm Standards as well as the latest standardization efforts for 450 mm wafers.

 

Published 450mm Standards:

  1. SEMI M1, Specifications for Polished Single Crystal Silicon Wafers
  2. SEMI M49, Guide for Specifying Geometry Measurement Systems for Silicon Wafers for the 130 nm to 22 nm Technology Generations
  3. SEMI M52, Guide for Specifying Scanning Surface Inspection Systems for Silicon Wafers for the130 nm to 11 nm Technology Generations
  4. SEMI M74, Specification for 450mm Diameter Mechanical Handling Polished Wafer
  5. SEMI M76, Specification for Developmental 450mm Diameter Polished Single Crystal Wafer
  6. SEMI M80: Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450mm Wafers
  7. SEMI E154, Mechanical Interface for 450mm Load Port
  8. SEMI E156, Mechanical Specification for 450mm AMHS Stocker to Transport Interface
  9. SEMI E158, Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450mm Wafers (450 FOUP) and Kinematic Coupling
  10. SEMI E159, Mechanical Specification for Multi Application Carrier (450 MAC) Used to Transport and Ship 450 mm Wafers
  11. SEMI E162: Mechanical Interface Specification for 450mm Front-Opening Shipping Box Load Port
  12. SEMI G88, Specification for Tape Frame for 450 mm Wafer
  13. SEMI AUX023, Overview Guide to SEMI Standards for 450mm Wafers

 

For further information on these standards, visit www.semi.org/standards

 

 

 

 

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