Breakthrough Research Technologies

Thursday, July 10, 2014

1:30pm-3:30pm

University and Research Institutions have become increasingly important to help accelerate technology advances.  This program will showcase current and future activities

along with the latest innovations and research from collaborative efforts of Universities, Industries and Consortiums.

 

Speakers


Moderator Welcome & Introductions
Dr. Pushkar P. Apte
President, Pravishyati Inc.
1:30pm-1:50pm                                                                   

Aberration Corrected Electron Microscopy: A Breakthrough Tool for Semiconductor Manufacturing

 

Presentation in PDF

 

Dr. John Mardinly,  Biography

Principal Materials Nanoanalysis Engineer
Arizona State University

 
1:50pm-2:10pm                   

MEMs Based Sensing Systems and their Packaging

 

 

Presentation in PDF

 

Professor Oliver Brand,   Biography

Interim Director, Institute for Electronics and Nanotechnology
Bioengineering, and Microelectronics/Microsystems
Georgia Institute of Technology

 
2:10pm-2:30pm    

Innovation through Materials Chemistry

 

 

Presentation in PDF

 

Dr. Doug Keszler,   Biography

Director Center for Sustainable Materials Chemistry

Oregon State University

 
2:30pm-2:50pm    

Working Across the Spectrum: Recent Activities and Emerging Capabilities at the UW Washington Nanofabrication Facility

 

 

Presentation in PDF

 

Dr. Michael Khbeis,   Biography

Director, Washington Nanofabrication Facility (WNF)

University of Washington

  
2:50pm-3:10pm    

Plasma Etch in the Era of Atomic Scale Fidelity

 

 

Presentation in PDF

 

Dr. Thorsten Lill,   Biography

Vice President Etch Emerging Technologies and Systems

Lam Research

 

A Lam Research, KU Leuven (University of Leuven) and IMEC Joint Project.

 
3:10pm-3:30pm    

Plasma Equipment and Process Simulation: Imagineering for Technology Development

 

Presentation in PDF

 

Dr. Peter Ventzek,   Biography

Senior Member of Technical Staff

Tokyo Electron (TEL)

 

Collaborations with Illinois, Iowa, Michigan, Tohoku and Keio Universities

 

 

Please check back frequently for updates and more information as agendas develop and speakers are announced.

 

How to Register for this Program

 

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Begin a new registration record and select this and any other programs you wish to attend during step 3. If you are already registered for SEMICON West, visitwww.semiconwest.org/rrc to log in to the Registration Resource Center.  Select "Agenda Builder" to add this program.



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