SEMICON West 2013

ASML’s NXE Platform Performance and Volume Introduction

Skip Miller
Director of Strategic Marketing



Six TWINSCAN NXE:3100 EUV systems are being utilized by chipmakers and good imaging, and overlay performance has been achieved. Integration of the next-generation NXE:3300B is well underway with multiple systems fully completed, tested and qualified. Excellent imaging results have been achieved with good process windows. Furthermore, single exposure results of 2D images for N10 node show the huge NXE imaging performance capability. Overlay performance meets the node requirements. Recent progress has been made in source power including dose control performance and run time. This presentation will update the latest performance achievements across all critical EUV specification parameters.

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